Standard Swedish standard · SS-EN ISO 23131:2022

Ellipsometry - Principles (ISO 23131:2021)

Status: Valid

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Standard Swedish standard · SS-EN ISO 23131:2022

Ellipsometry - Principles (ISO 23131:2021)
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Scope
This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories.
It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.

Subjects

General (17.020)


Buy this standard

Standard Swedish standard · SS-EN ISO 23131:2022

Ellipsometry - Principles (ISO 23131:2021)
Subscribe on standards - Read more Dölj
Price: 1 013 SEK
standard ikon pdf

PDF

Price: 1 013 SEK
standard ikon

Paper

Price: 1 620,80 SEK
standard ikon pdf + standard ikon

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Product information

Language: English

Written by: Svenska institutet för standarder

International title:

Article no: STD-80039413

Edition: 1

Approved: 11/18/2022

No of pages: 28